Comparison between different imaging modes in focussed ion beam instruments-Reference-Cited by-同舟云学术

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Comparison between different imaging modes in focussed ion beam instruments

Published:1996-01 Issue:1-4 Volume:30 Page:249-252
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Jiang X.R.,Kruit P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Coulomb interactions in microfocussed electron and ion beams

2. P. Kruit and X.R. Jiang, Influence of Coulomb interactions on choice of magnification, aperture size and source brightness in a two lens focussed ion beam column, to be published in J. Vac. Sci. Technol..

3. Coarse guidelines in designing focused ion beam optics

4. Comparison of optical design approaches for use with liquid metal ion sources

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