Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. X-ray lithography at Frascati: first results;Burattini,1989
2. Multiple reflection from surface x-ray optics;Kumakhov;Physics Reports No5,1990
3. Resist process in synchrotron radiation x-ray lithography;Shixiu,1992
4. X-ray mask copying based on negative resist RAY-PN;Shixiu;Microelectronic Engineering,1994