Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Overlay accuracy for VLSI devices;Wakamiya;Semicond. Int.,1985
2. Laser step alignment for a wafer stepper;Murakami;Proc. SPIE,1985
3. A new step-by step aligner for very large scale integration (VLSI) production;Mayer;Proc. SPIE,1980
4. W.G. Oldham, Program Reflect Version 2.0, University of California, Berkeley, CA.
5. Modelling of optical alignment images for semiconductor structures;Yuan;Proc. SPIE,1989