Reconstruction of topographies from multiple SEM views

Author:

Janssen Reinhard,Hersener Jürgen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. A Method for Taking Stereoscopic SEM Pictures by Eucentric Rotation in the Tilted Specimen Plane (at any degree of tilt);Blödorn;Scanning,1978

2. Reconstruction of True Surface-Topographies in Scanning Electron Microscopes Using Backscattered Electrons;Carlsen;Scanning,1985

3. Automatische Erzeugung dreidimensionaler Kantenmodelle aus mehreren zweidimensionalen Objektansichten;Helmke,1990

4. Multiple Detector Method for Quantitative Determination of Microtopography in the SEM;Lebiedzik;Scanning Electron Microscopy, Chicago,1975

5. Photogrammetric Self-Calibration of Scanning Electron Microscopes;Maune;Photogrammetric Engineering and Remote Sensing,1976

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