Micromachined silicon cantilevers and tips for scanning probe microscopy-Reference-Cited by-同舟云学术

Micromachined silicon cantilevers and tips for scanning probe microscopy

Published:1991-10 Issue:1-4 Volume:15 Page:407-410
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Buser R.A.,Brugger J.,de Rooij N.F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Scanning probe microscopy: Current status and future trends;Wickramasinghe;J. Vac. Sci. Technol. A,1990

2. Comparative Study of Lithium Fluoride and Graphite by Atomic Force Microscopy;Meyer,1988

3. Imaging with the tunneling & force Microscopes Proceeding of the IEEE Micro Electromechanical Systems;Quate,1990

4. Theoretical and Experimental Investigations on Silicon Single Crystal Resonant Structures;Buser,1989

5. Nanometer scale structure fabrication with the scanning tunneling microscope

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