Silicon microsensors: Construction, design and performance-Reference-Cited by-同舟云学术

Silicon microsensors: Construction, design and performance

Published:1991-10 Issue:1-4 Volume:15 Page:387-398
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Guckel H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Sensors for Mechanical Properties;Medlock;J. Phys. E, Sci. Instrum.,1983

2. J. Bryzek, “Modeling Performance of Piezoresistive Pressure Sensors,” Transducers '85, pp. 168–173.

3. Solid State Digital Pressure Transducer;Peake;IEEE Transactions on Electron Devices,1969

4. A Piezoresistive Integrated Pressure Sensor;Yamada;Sensors and Actuators,1983

5. Integrated Piezoresistive Pressure Sensor with Both Voltage and Frequency Output;Sugiyama;Sensors and Actuators,1983

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