Author:
Levi-Setti Riccardo,Chabala Jan M.,Hallegot Philippe,Wang Yuh-Lin
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Three-Dimensional Imaging with Cluster Ion Beams;Cluster Secondary Ion Mass Spectrometry;2013-04-15
2. A focused ion beam secondary ion mass spectroscopy system;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-11
3. Recent advances in application of focused ion beam technology;Microelectronic Engineering;1993-04