Dynamic MC simulation of DLC films synthesis by PBII-Reference-Cited by-同舟云学术

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Dynamic MC simulation of DLC films synthesis by PBII

Published:2002-07 Issue:1-3 Volume:156 Page:87-91
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Miyagawa Yoshiko,Nakadate Hiroshi,Tanaka Masaaki,Miyagawa Soji

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference10 articles.

1. Dynamic-Monte Carlo simulations of diamond-like carbon film synthesis by ion-assisted deposition

2. Y. Miyagawa, S. Nakao, S. Miyagawa, Surf. Coat. Technol. 136 (2001) in print.

3. Computer Simulation of Ion–Solid Interactions, Springer Ser. Mater. Sci., vol. 10;Eckstein,1991

4. Radical and film growth kinetics in methane radio‐frequency glow discharges

5. Deposition mechanism of hydrogenated hard‐carbon films in a CH4rf discharge plasma

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