Gradient metal—a-C:H coatings deposited from dense plasma by a combined PVD/CVD process
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference11 articles.
1. Hard amorphous (diamond-like) carbons
2. Friction and wear of ceramics
3. Application-oriented modifications of deposition processes for diamond-like-carbon-based coatings
4. Tribological and electrical properties of metal‐containing hydrogenated carbon films
5. Industrial applications of plasma and ion surface engineering
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mechanical and Tribological Properties of Cr-DLC Coatings Deposited by ARC-MAG-RF PACVD Hybrid Method;Plasma Processes and Polymers;2007-04
2. Hybrid plasma system for diamond-like carbon film deposition;Surface and Coatings Technology;2000-09
3. Characterization of a-C:H films with metal interlayers and mixed interfaces;Surface and Coatings Technology;1999-09
4. Diagnostics and modelling of hollow cathode arc plasma used for deposition of metal–carbon films;Surface Engineering;1998-01
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