Properties of sputtered hard coatings depending on macro- and micro-geometry of the substrates-Reference-Cited by-同舟云学术

Properties of sputtered hard coatings depending on macro- and micro-geometry of the substrates

Published:1997-12 Issue:1-3 Volume:97 Page:326-334
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Berg G,Friedrich C,Broszeit E,Berger C

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference13 articles.

1. Material selection for hard coatings;Hollek;J. Vacuum Sci. Technol. A,1986

2. G. Kienel, Vakuumbeschichtung, Bd. 1, 3, 4, 5., VDI-Verlag, Düsseldorf, 1993.

3. G. Crolly, H. Oechsner, Plasmadiagnostik in Niederdruck-Plasmen: Elektrostatische Sonden, Optische Emissionsspektroskopie, energiedispersive Massenspektrometrie, presented at AK Plasmaoberflächentechnik, Chemnitz, Germany, 1995.

4. VDI Berichte 866, Beschichtung hochbeanspruchter Bauteile, VDI-Verlag, Düsseldorf, 1990.

5. DIN Fachbericht 39, Charakterisierung dünner Schichten, 1. Aufl., Beuth Verlag, Berlin, 1993.

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