Magnetron sputtering on large scale substrates: an overview on the state of the art-Reference-Cited by-同舟云学术

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Magnetron sputtering on large scale substrates: an overview on the state of the art

Published:1997-08 Issue:1 Volume:93 Page:1-6
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Kukla Reiner

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference13 articles.

1. F.M. Penning, US-PS 2, 146, 025.

2. J.S. Chapin, US-PS 4, 166, 018.

3. Thin Film Processes II;Vossen,1991

4. Deposition Technologies for Films and Coatings;Bunshah,1982

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