Author:
Korzec D.,Nithammer D.,Engemann J.,Ikeda T.,Aoki T.,Hatanaka Y.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference22 articles.
1. Preparation of silicon based widegap semiconductor film from organo-silicon by using remote plasma CVD method;Hatanaka,1994
2. The reaction of atomic hydrogen with acetylene;Tollefson;J. Chem. Phys.,1948
3. The surface recombination of H atoms and OH radicals;Smith;J. Chem. Phys.,1943
4. Dissociation and ionization of hydrogen in high frequency discharges;Goodyear;Proc. Phys. Soc.,1962
5. Characterization of a slot antenna microwave plasma source for hydrogen plasma cleaning;Korzec;J. Vac. Sci. Technol.,1995
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