Spatially resolved measurements of plasma parameters in a broad-beam ion source
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference14 articles.
1. Handbook of Ion Beam Processing Technology;Cuomo,1989
2. Ion Sources;Wolf,1995
3. Fragmentational collisions in reactive ion beam processing
4. Design of ion energy distributions by a broad beam ion source
5. Characterization of a modular broad beam ion source
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