Author:
Wang Shuangbao,Liang Hong,Zhu Peiran
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Cited by
2 articles.
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1. Structural characterization of dual ion implantation in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-12
2. The influence of TiN on cosputtered (Ti+Si) blanket film;Thin Solid Films;2003-01