Electromagnetic wave propagation in an ECR plasma
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference22 articles.
1. Microwave ion source
2. Microwave Plasma Etching
3. Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma
4. Extremely high selective, highly anisotropic, and high rate electron cyclotron resonance plasma etching for n+ poly-Si at the electron cyclotron resonance position
5. Production of a Large-Diameter Uniform ECR Plasma with a Lisitano Coil
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1. Self-mode transition, oscillation and inverse hysteresis in ECR discharges;AIP Advances;2023-09-01
2. Measurement and Optimization of an ECR Plasma Source;2021 Photonics & Electromagnetics Research Symposium (PIERS);2021-11-21
3. Characteristics of microwave ECR ion thruster powered with plate antenna in cross-magnetic field: Standing wave, skin effect, and mode transition;Physics of Plasmas;2021-03
4. Numerical modeling of the effect of mirror magnetic field strength on electron distributions in electron cyclotron resonance plasma sources;Thin Solid Films;2020-11
5. Metallic Nanoalloys;Handbook of Less-Common Nanostructures;2012-03-19
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