AFM investigation of tribological properties of nano-patterned silicon surface-Reference-Cited by-同舟云学术

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AFM investigation of tribological properties of nano-patterned silicon surface

Published:2008-08 Issue:5-6 Volume:265 Page:577-582
ISSN:0043-1648
Container-title:Wear
language:en
Short-container-title:Wear

Author:

Marchetto D.,Rota A.,Calabri L.,Gazzadi G.C.,Menozzi C.,Valeri S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics

Reference27 articles.

1. State of the art in laser surface texturing;Etsion;J. Tribol. Trans. ASME,2005

2. MEMS Mechanical Sensor;Beeby,2004

3. Tribology Issues and Opportunities in MEMS;Bhushan,1998

4. Micromachines: A New Era in Mechanical Engineering;Fujimasa,1997

5. Hanbook of Nanotechnology,2004

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