1. J. D. Gelorme, R. J. Cox, S.A.R. Gutierrez, IBM, Photoresist Composition and Printed Circuit Boards and Packages Made There With, US Patent 4882245, 1989.
2. See various articles in the special issue titled "15 Years of SU-8 as MEMS material" of Micromachines, ISSN 2072-666X, 2014–2015.
3. Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates;Lau;Microsys. Technol.,2013
4. Microstructuring of SU-8 resist for MEMS and bio-applications;Dey;Int. J. Smart Sens. Intell. Syst.,2010
5. Tribological challenges in micromechanical systems;Maboudian;Tribol. Lett.,2002