Author:
Haochih Liu Bernard,Chen Cheng-Hsien
Funder
National Science Council (Taiwan ROC)
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. Micro/nanotechnology studies using scanning probe microscopy;Bhushan,2004
2. H.-C. Liu, D. Fong, G.A. Dahlen, M. Osborn, S. Hand, J.R. Osborne, Carbon nanotube AFM probes for microlithography process control, in: SPIE Miocrolithography, San Jose, 2006, pp. 61522Y.
3. Carbon nanotube scanning probe for profiling of deep-ultraviolet and 193nm photoresist patterns;Nguyen;Applied Physics Letters,2002
4. Nanotubes as nanoprobes in scanning probe microscopy;Dai;Nature,1996
5. Deformation and wear of pyramidal, silicon-nitride AFM tips scanning micrometre-size features in contact mode;Bloo;Measurement,1999
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献