Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference37 articles.
1. Semiconductor Industry Association;International Technology Roadmap for Semiconductors,1999
2. 〈http://www.itrs.net/Links/2006Update/2006UpdateFinal.htm〉.
3. J.R. Matey, US Patent 4481616.
4. Scanning capacitance microscopy
5. Scanning capacitance microscopy
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. The resolutions of drive-level capacitance profiling technique;Review of Scientific Instruments;2023-06-01
2. Electrostatic Fields;Quantitative Data Processing in Scanning Probe Microscopy;2018
3. Electrostatic Fields;Quantitative Data Processing in Scanning Probe Microscopy;2013