AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS-Reference-Cited by-同舟云学术

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AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS

Published:2005-11 Issue:1-4 Volume:105 Page:176-188
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Bhushan Bharat,Kasai Toshi,Kulik Gerit,Barbieri Laura,Hoffmann Patrik

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Tribology Issues and Opportunities in MEMS;Bhushan,1998

2. Springer Handbook of Nanotechnology;Bhushan,2004

3. An Introduction to Ultrathin Organic Films: From Langmuir–Blodgett to Self-Assembly;Ulman,1991

4. Formation and Structure of Self-Assembled Monolayers

5. Introduction to Tribology;Bhushan,2002

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