Quartz tuning fork based three-dimensional topography imaging for sidewall with blind features-Reference-Cited by-同舟云学术

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Quartz tuning fork based three-dimensional topography imaging for sidewall with blind features

Published:2020-03 Issue: Volume:210 Page:112916
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Akhtar Imtisal,Rehman Malik Abdul,Choi Woosuk,Bae Joonho,Seo Yongho

Funder

National Research Foundation of Korea

Ministry of Education

KETEP

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference37 articles.

1. Atomic force microscopy and spectroscopy;Seo;Rep. Prog. Phys.,2008

2. A review of atomic force microscopy imaging systems: application to molecular metrology and biological sciences;Jalili;Mechatronics,2004

3. Dynamic atomic force microscopy methods;Garcia;Surf. Sci. Rep.,2002

4. Force measurements with the atomic force microscope: technique, interpretation and applications;Butt;Surf. Sci. Rep.,2005

5. Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope;Jang;Appl. Phys. Lett.,2003

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atomic force microscopy based micro and nano sidewall imaging;Nanoscience;2024-09-04

2. True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor;Sensors;2021-12-31

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