Nanomechanical characterization of multilayered thin film structures for digital micromirror devices-Reference-Cited by-同舟云学术

Nanomechanical characterization of multilayered thin film structures for digital micromirror devices

Published:2004-08 Issue:3-4 Volume:100 Page:375-389
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Wei Guohua,Bhushan Bharat,Joshua Jacobs S

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. L.J. Hornbeck, W.E. Nelson, Bistable deformable mirror device, OSA Technical Digest Series, Spatial Light Modulators and Applications, Vol. 8, Optical Society of America, Washington, DC, 1988, pp. 107.

2. The DMDTM Projection Display Chip: A MEMS-Based Technology

3. M.R. Douglass, Lifetime estimates and unique failure mechanisms of the digital micromirror devices (DMD), 1998 International Reliability Physics Proceedings, IEEE Catalog No. 98CH36173, Presented at the 36th Annual International Reliability Physics Symposium, Reno, 1998, pp. 9–16.

4. Introduction to Tribology;Bhushan,2002

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