1. Atomic force microscope;Binnig;Phys. Rev. Lett.,1986
2. Multiple detector methods for quantitative determination of microphotopography in the SEM;Lebiedzik;Scan. Electron Microsc.,1975
3. Measurement of surface topography using SEM with two secondary electron detectors;Suganuma;J. Electron. Microsc.,1985
4. Shape from shading using multiple detector signals in scanning electron microscopy;Reimer;Scan. Microsc.,1987
5. 3D imaging of VLSI wafer surfaces using a multiple detector SEM;Gold,1997