Trajectory displacement in a multi beam scanning electron microscope-Reference-Cited by-同舟云学术

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Trajectory displacement in a multi beam scanning electron microscope

Published:2021-04 Issue: Volume:223 Page:113223
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Stopka Jan^ORCID,Zuidema Wilco,Kruit Pieter

Funder

Ministry of Education Youth and Sports of the Czech Republic

Technology Agency of the Czech Republic

Czech Academy of Sciences

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Addition of different contributions to the charged particle probe size;Barth;Optik,1996

2. Charged Particle Optics Theory;Groves,2015

3. Coulomb Interactions in Particle Beams;Jansen,1990

4. Space charge and statistical Coulomb effects;Kruit,2009

5. Trajectory displacement effect in particle projection lithography systems;Jansen;J. Appl. Phys.,1998

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