Author:
Kozicki M.N.,Hsia S.W.,Owen A.E.,Ewen P.J.S.
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Proc. Sixth VLSI Multilevel Interconnection Conference;Kozicki,1989
2. R.E. Belford, E. Hajto and A.E. Owen. To be published in Thin Solid Films.
3. Submicron optical lithography using an inorganic resist/polymer bilevel scheme
4. Amorphous Semiconductor Technologies and Devices;Mizushima,1981
5. Photo-induced structural and physico-chemical changes in amorphous chalcogenide semiconductors
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