Vapour deposition of poly(alkyl-2-cyanoacrylate) resist coatings: a new electron-beam/deep-ultra-violet photoresist technology
Author:
Publisher
Elsevier BV
Subject
Polymers and Plastics,Materials Chemistry,Organic Chemistry
Reference21 articles.
1. Ionic and zwitterionic polymerization of n-alkyl 2-cyanoacrylates
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