Author:
Wyant James C.,Creath Katherine
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference6 articles.
1. Development of an automatic focusing mechanism for an interference microscope;Cohen,1989
2. Step height measurement using two-wavelength phase-shifting interferometry;Creath;Appl. Opt.,1987
3. Phase-measurement interferometry techniques;Creath,1988
4. Absolute measurement of surface roughness;Creath;Appl. Opt.,1990
5. Digital phase-shifting interferometry: a simple error-compensating phase calculating algorithm;Hariharan;Appl. Opt.,1987
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