Adhesion, friction, and wear of plasma-deposited thin silicon nitride films at temperatures to 700 °C-Reference-Cited by-同舟云学术

Adhesion, friction, and wear of plasma-deposited thin silicon nitride films at temperatures to 700 °C

Author:

Miyoshi K.,Pouch J.J.,Alterovitz S.A.,Pantic D.M.,Johnson G.A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics

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