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Effect of progressive wear on the friction characteristics of nickel LIGA processed rotors

  • Published:1996-03 Issue:1-2 Volume:192 Page:199-207
  • ISSN:0043-1648
  • Container-title:Wear
  • language:en
  • Short-container-title:Wear

Author:

Mathieson D.,Beerschwinger U.,Yang S.J.,Reuben R.L.,Taghizadeh M.,Eckert S.,Wallrabe U.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics

Reference16 articles.

1. Microsystems: The new technology revolution;Menz;Interdisciplinary Sci. Rev.,1993

2. Electric and fluid field analysis of side drive micromotors;Omar;J. Microelectromech. Syst.,1992

3. Design rules and test of electrostatic micromotors made by the LIGA process;Wallrabe;J. Micromech. Microeng.,1994

4. Microtorque measurements for a prototype turbine;Mathieson;J. Micromech. Microeng.,1994

5. Micromechanical comb actuators with low drive voltage;Jaecklin;J. Micromech. Microeng.,1992
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