Microstructure evolution and non-diamond carbon incorporation in CVD diamond thin films grown at low substrate temperatures
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference21 articles.
1. Worldwide status of low temperature growth of diamond
2. Graphite formation in diamond film deposition
3. TEM observations of diamond films prepared by microwave plasma CVD
4. Electron microscopy of the growth features and crystal structures of filament assisted CVD diamond films
5. Analysis of chemical-vapour-deposited diamond grain boundaries using transmission electron microscopy and parallel electron energy loss spectroscopy in a scanning transmission electron microscope
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