Author:
Izumi Shigekazu,Yamamoto Yoshitsugu,Kunii Tetsuro,Miyakuni Shinichi,Hayafuji Norio,Sato Kazuhiko,Otsubo Mutsuyuki
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Cited by
1 articles.
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1. Multiwafer gas source molecular beam epitaxial system for production technology;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999