In situ concentration monitoring in a vertical OMVPE reactor by fiber-optics-based Fourier transform infrared spectroscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference14 articles.
1. Measurement and control of reagent concentrations in MOCVD reactor using ultrasonics
2. In situ measurement of the metalorganic and hydride partial pressures in a MOCVD reactor using ultraviolet absorption spectroscopy
3. Monitoring of gas-phase species in metalorganic vapor phase epitaxy by fiber-optics based Fourier transform infrared spectroscopy
4. Growth characteristics of a vertical rotating-disk OMVPE reactor
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