Infrared single wavelength gas composition monitoring for metalorganic vapour-phase epitaxy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference11 articles.
1. An ultra-fast gas delivery system for producing abrupt compositional switching in OMVPE
2. In situ, real-time diagnostics of OMVPE using IR-diode laser spectroscopy
3. In situ measurement of the metalorganic and hydride partial pressures in a MOCVD reactor using ultraviolet absorption spectroscopy
4. Growth of strained layer superlattices by MOVPE III. Use of UV absorption to monitor alkyl stability in the reactor
5. Control of III–V epitaxy in a metalorganic chemical vapor deposition process: impact of source flow control on composition and thickness
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