Development of a modular, large-scale, high-throughput semicontinuous-mode liquid-phase epitaxy system

Author:

Mauk M.G,Shellenbarger Z.A,Sims P.E,Bloothoofd W,McNeely J.B,Collins S.R,Rabinowitz P.I,Hall R.B,DiNetta L.C,Barnett A.M

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference19 articles.

1. Comparison and critique of the epitaxial growth techniques;Grange,1985

2. Fundamentals of epitaxial growth and atomic layer epitaxy;Watanabe,1990

3. Solution grown Ga1−xAlxAs superlattice structures

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5. MOVPE: is there any other technology for optoelectronics?

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2. Epitaxial Crystal Growth: Methods and Materials;Springer Handbook of Electronic and Photonic Materials;2017

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4. Epitaxial Crystal Growth: Methods and Materials;Springer Handbook of Electronic and Photonic Materials;2006

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