Experimental design method applied to microwave plasma enhanced chemical vapor deposition diamond films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference28 articles.
1. Handbook of Carbon, Graphite, Diamond and Fullerenes;Pierson,1993
2. Growth of diamond particles from methane-hydrogen gas
3. Diamond synthesis from gas phase in microwave plasma
4. Growth of diamond thin films by electron assisted chemical vapor deposition
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