Surface kinetics of metalorganic vapor-phase epitaxy: surface diffusion, nucleus formation, sticking at steps
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference21 articles.
1. Kinetics of Ordering and Growth at Surfaces;Lagally,1990
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1. Thermodynamic analysis of Al0.17Ga0.83As/GaAs (001) in annealing process;Acta Physica Sinica;2018
2. The impact of the surface on step-bunching and diffusion of Ga on GaAs (001) in metal-organic vapour phase epitaxy;Materials Research Express;2016-07-15
3. Influence of annealing condition and multicycle AlGaAs/GaAs structures on the Al 0.26 Ga 0.74 As surface morphology;Applied Surface Science;2015-08
4. Applicability study of the structure-factor phase method for determining the polarity of binary semiconductors;Acta Crystallographica Section B Structural Science, Crystal Engineering and Materials;2013-11-18
5. Conformality Investigation of Titanium Dioxide Thin Films on 3-D Micrometer- and Nanometer-scale Features by Pulsed-Pressure Metal-organic CVD;Chemical Vapor Deposition;2011-12
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