Influence of bombardment-induced Gibbsian segregation on alloy sputtering
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference33 articles.
1. Abstract: Sputtering of multicomponent metal and semiconductor targets
2. On the problem of whether mass or chemical bonding is more important to bombardment-induced compositional changes in alloys and oxides
3. Modifications of subsurface alloy composition during high-temperature sputtering
4. Differential sputtering and surface segregation: The role of enhanced diffusion
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