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Composition changes in Ar+ and e−-bombarded SiC: an attempt to distinguish ballistic and chemically guided effects

  • Published:1993-01 Issue: Volume:80-81 Page:931-937
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Miotello Antonio,Calliari Lucia,Kelly Roger,Laidani Nadhira,Bonelli Marco,Guzman Luis

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference34 articles.

1. Structure-Property Relationships in Surface-Modified Ceramics;McHargue,1989

2. Bombardment-induced compositional change with alloys, oxides, oxysalts and halides III. The role of chemical driving forces

3. these Proceedings 8th Int. Conf. on Ion Beam Modification of Materials;Kelly,1993

4. Preferential effects in electron irradiated silicon dioxide

5. N. Laidani, R. Capelletti, M. Elena, L. Guzman, G. Mariotto, A. Miotello, and P.M. Ossi, Thin Solid Films, in press.

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1. Diffusion of fission products and radiation damage in SiC;Journal of Physics D: Applied Physics;2013-10-28

2. Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications;Journal of Physics D: Applied Physics;2007-10-21

3. X-Ray Photoelectron Spectroscopy Analysis of the Electron Beam Treated SiC Films Before and After Hydrogen Ion Irradiation;Chinese Physics Letters;2004-01

4. The estimation of sputtering yields for SiC and Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-11

5. Mass-transport driven by atomic displacement and ballistic relocation effects under ion irradiation;Surface and Coatings Technology;2002-03
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