Ion cluster beam deposition of thin films
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference25 articles.
1. Ion Beam Assisted Film Growth,1989
2. Proc. 2nd Int. Conf. on Ion Sources;Takagi,1972
3. Ionized‐cluster beam deposition
4. Formation mechanism of large clusters from vaporized solid material
5. Computer simulation of ionized cluster beam bombardment on a carbon substrate
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