Author:
R. Berning Paul,Niiler Andrus
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
5 articles.
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1. Probing the spatial dimensions of nanoscale patterns with Rutherford backscattering spectrometry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2023-07
2. Layer morphology analysis of sputter-eroded silicon gratings using Rutherford backscattering;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-08
3. Status of ion beam data analysis and simulation software;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-03
4. Roughness in GaN/InGaN films and multilayers determined with Rutherford backscattering;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2004-05
5. High energy ion scattering and recoil spectrometry in applied materials science;Analytica Chimica Acta;1994-10