First-principles simulation of collision cascades in Si to test pair-potentials for Si-Si interaction at 10 eV–5 keV-Reference-Cited by-同舟云学术

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First-principles simulation of collision cascades in Si to test pair-potentials for Si-Si interaction at 10 eV–5 keV

Published:1994-06 Issue:4 Volume:88 Page:382-386
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Keinonen J.,Kuronen A.,Nordlund K.,Nieminen R.M.,Seitsonen A.P.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference43 articles.

1. Proc. Int. Conf. on Defects and Radiation Effects in Semiconductors;Picraux,1979

2. Beam-Solid Interactions and Phase Transformations;Brown,1985

3. Beam-Solid Interactions and Phase Transformations;Williams,1985

4. Proc. 13th Int. Conf. on Defects in Semiconductors;Choyke,1984

5. Application of high energy implantation in semiconductors

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