Microstructure of titanium nitride films produced by the dynamic mixing method-Reference-Cited by-同舟云学术

Microstructure of titanium nitride films produced by the dynamic mixing method

Published:1988-06 Issue:1-4 Volume:33 Page:649-652
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Masato Kiuchi,Kanenaga Fujii,Toshimitsu Tanaka,Mamoru Satou,Fujimoto Fuminori

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference9 articles.

1. M. Satou, F. Fukui and F. Fujimoto, Proc. Int. Workshop by Professional Groups on Ion-based Techniques for Film Formation (Ionics Corp. Ltd., Tokyo) p. 349.

2. Proc. 6th Symp. Ion Sources and Ion-Asisted Technology;Satou,1982

3. Formation of Cubic Boron Nitride Films by Boron Evaporation and Nitrogen Ion Beam Bombardment

4. A new machine for film formation by ion and vapour deposition

5. Nitride film formation by ion and vapour deposition

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