Determination of nitrogen in semiconductor materials using the 14N(p, α)11C and 14N(d, n)15O nuclear reactions
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference29 articles.
1. Nitrogen in Silicon
2. Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor Silicon
3. Nitrogen as dopant in silicon and germanium
4. Vibrational absorption bands for implanted nitrogen in crystalline silicon
5. Thermal Annealing of Si‐N Absorption Bands in Nitrogen‐Implanted Silicon
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