Author:
Zalm P.C.,Fontijn G.M.,Janssen K.T.F.,Vriezema C.J.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference4 articles.
1. The Stopping and Range of Ions in Solids;Ziegler,1985
2. Energy Dissipation by Ions in the kev Region
3. Ion Implantation Techniques;Biersack,1982
4. Implanted boron profiles in silicon
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