1 MV rotating-disc type high voltage generator for application to an implanter-Reference-Cited by-同舟云学术

1 MV rotating-disc type high voltage generator for application to an implanter

Published:1985-01 Issue:1-2 Volume:6 Page:250-257
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Isoya A.,Miyake Y.,Takagi K.,Uchiyama T.,Yui K.,Kikuchi R.,Komiya S.,Hayashi C.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference5 articles.

1. Tech. Digest 1981 Int. Electron Devices Meeting;Wordeman,1981

2. Tech. Digest 1981 Int. Electron Devices Meeting;Doken,1981

4. Proc. 3rd Symp. on Accelerator science and technology;Isoya,1980

5. A. Isoya, K. Kobayashi, T. Nakashima and T. Maeda, to be published.

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