Non-regular depth profiles of light ions implanted into organic polymer films
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference8 articles.
1. Distributions of light ions and foil destruction after irradiation of organic polymers
2. Mass and energy dependence of implanted ion profiles in the AZ111 photoresist
3. R.B. Guimarães et al., to be published.
4. A Monte Carlo computer program for the transport of energetic ions in amorphous targets
5. The use of neutron induced reactions for light element profiling and lattice localization
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