Formation of buried carbon nitride by high dose nitrogen implantation into carbon thin film
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference14 articles.
1. Prediction of New Low Compressibility Solids
2. Structural properties and electronic structure of low-compressibility materials: β-Si3N4and hypothetical β-C3N4
3. Nano‐indentation studies of ultrahigh strength carbon nitride thin films
4. Experimental Realization of the Covalent Solid Carbon Nitride
5. Formation of Carbon Nitride Films by Means of Ion Assisted Dynamic Mixing (IVD) Method
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3. X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films;Applied Surface Science;2002-06
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