A semidynamic study of polymer surface morphology development in Kapton-HTM sputter etched by 6 keV xenon atoms-Reference-Cited by-同舟云学术

A semidynamic study of polymer surface morphology development in Kapton-HTM sputter etched by 6 keV xenon atoms

Published:1987-09 Issue:2 Volume:28 Page:259-263
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Michael R.,Stulik D.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference50 articles.

1. Ion Bombardment Modification of Surfaces: Fundamentals and Applications,1984

2. Sputtering by Particle Bombardment: I, II — Topics in Applied Physics,1982

3. Inelastic Ion Surface Collisions,1977

4. Ion Bombardment of Solids;Carter,1968

5. Atomic and Ionic Impact Phenomena on Metal Surfaces;Kaminsky,1965

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5. Reflection electron energy loss spectroscopy (REELS) of conductive polymers obtained by keV bombardment;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-03