Large-scale implantation and deposition research at Los Alamos National Laboratory
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference22 articles.
1. Sheath thickness and potential profiles of ion‐matrix sheaths for cylindrical and spherical electrodes
2. Plasma source ion‐implantation technique for surface modification of materials
3. Plasma source ion implantation: A new approach to ion beam modification of materials
4. Cost estimates for commercial plasma source ion implantation
5. Initial operation of a large-scale plasma source ion implantation experiment
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3. Plasma-based ion implantation and deposition: a review of physics, technology, and applications;IEEE Transactions on Plasma Science;2005-12
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