Production of oxygen plasmas using radio-frequency magnetron-discharge-Reference-Cited by-同舟云学术

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Production of oxygen plasmas using radio-frequency magnetron-discharge

Published:1991-04 Issue:1-4 Volume:55 Page:364-369
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Shibuya Takehisa,Hashimoto Shizuyo,Yabe Eiji,Takayama Kazuo

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference6 articles.

1. Ion‐assisted deposition of bulklike ZrO2films

2. Ion-beam-assisted deposition of thin films

3. Ion-assisted deposition of optical thin films: low energy vs high energy bombardment

4. Protective dielectric coatings produced by ion-assisted deposition

5. Ion beam processing for coating MgF_2 onto ambient temperature substrates

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2. A 13.56MHz multicusp ion source for gaseous ion-beam production;Surface and Coatings Technology;1999-02

3. High‐energy electron‐free plasma source;Applied Physics Letters;1994-08-08

4. Large volume radio‐frequency plasma source using a magnetic line‐cusp field;Review of Scientific Instruments;1994-04

5. Production of RF Plasma Using a Magnetic Line-Cusp Field;Japanese Journal of Applied Physics;1994-03-15

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